WebThis paper describes the principle and performance of FlexRay, a fully programmable illuminator for high NA immersion systems. Sources can be generated on demand, by manipulating an array of mirrors instead of the traditional way of inserting optical elements and changing lens positions. On demand (freeform) source availability allows for … WebAs is well recognized, source mask optimization (SMO) is a highly effective means of extending the lifetime of a certain photolithography generation without an expensive upgrade to the next generation optical system. More than an academic theory, source optimization first found practical applications in the debut of the pixel-like programmable illuminator …
1.2 FlexRay - yumpu.com
WebAbstract. IC manufacturers have a strong demand for transferring a working process from one scanner to another. Recently, a programmable illuminator (FlexRay TM) became available on ASML ArF immersion scanners that, besides all the parameterized source shapes of the earlier Aerial TM illuminator (based on diffractive optical elements) can … WebThis paper describes the principle and performance of FlexRay, a fully programmable illuminator for high NA immersion systems. Sources can be generated on demand, by … project x sd graphite review
Generation of arbitrary freeform source shapes using advanced
WebThis paper describes the principle and performance of FlexRay, a fully programmable illuminator for high NA immersion systems. Sources can be generated on demand, by manipulating an array of mirrors instead of the traditional way of inserting optical elements and changing lens positions. On demand (freeform) source availability allows for … WebASML’s FlexRay freeform illuminator makes it easier and faster to create and implement those custom shapes in volume manufacturing. FlexRay offers a higher level of control … WebFeb 22, 2010 · ASML’s FlexRay freeform illuminator makes it easier and faster to create and implement those custom shapes in volume manufacturing. FlexRay offers a higher-level of control and tighter pupil specifications than previous solutions, enabling better tool-to-tool matching and improved critical dimension uniformity (CDU), or chip structure ... la. department of wildlife and fisheries